An Efficient MEMS Sensor Modelling by Geometrical Parameter Optimization
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: International Journal of Electronics and Telecommunications
سال: 2023
ISSN: ['2300-1933', '2081-8491']
DOI: https://doi.org/10.24425/ijet.2022.139880